Coating-film forming apparatus and manufacture managing device



【課題】 品質・性能が劣化した薬液の使用を的確に防止するとともに使用可能な薬液を継続使用することにより素子の製造コストを低減する。 【解決手段】 装填される薬液の保管温度のデータを少なくとも含み上記薬液の特性に関連するデータから上記薬液の品質に相関するデータである相関データを作成し、この相関データに基づいて上記薬液が所期の品質を保持しているか否かを判定する。 【選択図】 図4
PROBLEM TO BE SOLVED: To reduce a manufacturing cost of any element by preventing properly the use of chemicals to the element whose qualities and performances have been degraded, and by using usable chemicals continuously. SOLUTION: A manufacture managing apparatus so includes at least the data of the preserving temperatures of the chemicals loaded to a coating-film forming apparatus as to create from the data associated with the characteristics of the chemicals, the correlation data of the data correlated to the qualities of the chemicals, and as to decide, on the basis of the correlation data, whether the chemicals hold expectant qualities or not. COPYRIGHT: (C)2006,JPO&NCIPI




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    JP-2007103800-AApril 19, 2007Toshiba Corp, 株式会社東芝薬液塗布装置制御方法および薬液塗布装置