Method of manufacturing sintered thin plate

焼結薄板の製造方法

Abstract

【課題】面精度の高い大型の焼結薄板を製造する方法を提供する。 【解決手段】粗研磨工程において、研磨前焼結薄板を、片面ずつ交互に研磨し、研磨は、研磨後の平面度をα、平行度をβとしたとき、α≦20μm、かつ、β≦20μmを満すように実行する。次に、仕上げ研磨工程において、粗研磨後焼結薄板を、片面ずつ交互に研磨する工程を含む。 【選択図】 図1
PROBLEM TO BE SOLVED: To provide a method for manufacturing a sintered thin plate of large size with high surface precision. SOLUTION: In a rough polishing process, a sintered thin plate before polishing is polished for both surfaces alternately. Polishing is executed to satisfy α≤20μm, and β≤20μm, where α and β respectively refer to flatness and parallelism after polishing. Next, in a finishing polishing process, the sintered thin plate after rough polishing is polished for both surfaces alternately. COPYRIGHT: (C)2006,JPO&NCIPI

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    JP-2010030030-AFebruary 12, 2010Fujifilm Corp, 富士フイルム株式会社薄膜脆性材料の表面研摩方法